SMT Equipment

Phantom - Reactive Ion Etch (RIE) System

Company Information:

Trion provides versatile plasma equipment (ICP-RIE, PECVD, PVD, Ashers, and more) to enable our customers in the MEMS, Semiconductor, LED, RF Power, F.A., Opto-, III-V, Wafer Level Packaging, Thin Film Head, and Solar industries.

Clearwater, Florida, USA

Manufacturer

  • Phone (727)461-1888

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Company Postings:

(9) products in the catalog

Phantom - Reactive Ion Etch (RIE) System

Phantom - Reactive Ion Etch (RIE) System

Name:

Phantom - Reactive Ion Etch (RIE) System

Category:

Surface Finish

Offered by:

Trion Technology

Phantom - Reactive Ion Etch (RIE) System Description:

The Phantom RIE is designed to supply research and failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using fluorine and oxygen based chemistries. The system has a compact, modular design built on a space-saving platform.

Applications: MEMS, Solid State Lighting, Failure Analysis, Research & Development, Pilot Line.

For more information: http://www.triontech.com ..... Email: info@triontech.com ..... Phone: +1 727-461-1888

Phantom - Reactive Ion Etch (RIE) System was added in Jun 2010

Phantom - Reactive Ion Etch (RIE) System has been viewed 575 times

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