SMT Equipment

Minilock-Phantom - Reactive Ion Etcher (RIE) with a Vacuum Loadlock

Company Information:

Trion provides versatile plasma equipment (ICP-RIE, PECVD, PVD, Ashers, and more) to enable our customers in the MEMS, Semiconductor, LED, RF Power, F.A., Opto-, III-V, Wafer Level Packaging, Thin Film Head, and Solar industries.

Clearwater, Florida, USA

Manufacturer

  • Phone (727)461-1888

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(9) products in the catalog

Minilock-Phantom - Reactive Ion Etcher (RIE) with a Vacuum Loadlock

Minilock-Phantom - Reactive Ion Etcher (RIE) with a Vacuum Loadlock

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Minilock-Phantom - Reactive Ion Etcher (RIE) with a Vacuum Loadlock

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Surface Finish

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Trion Technology

Minilock-Phantom - Reactive Ion Etcher (RIE) with a Vacuum Loadlock Description:

The Minilock-Phantom is the first RIE system in the industry to incorporate a vacuum load-lock on a compact platform. The system has been designed to meet all the safety and equipment needs for the most challenging processes including etch applications that require corrosive chemistries.

Because metal and compound semiconductor etch processes use corrosive chemistries and are often sensitive to atmospheric moisture, consistent results as well as safety depend upon isolating the reaction chamber from the atmosphere. In addition, when operating at lower pressure, maintaining reproducible results from run to run is impacted when the chamber is exposed to the atmosphere between each run. The Minilock- Phantom solves these and other issues with its fully integrated load-locked delivery system.

Applications: Compound Semiconductor, Failure Analysis, Research & Development, Pilot Line.

For more information: http://www.triontech.com .... Email: info@triontech.com .... Phone: +1 727-461-1888

Minilock-Phantom - Reactive Ion Etcher (RIE) with a Vacuum Loadlock was added in Jun 2010

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