Gemini - Multi-Chamber Stripper

Gemini - Multi-Chamber Stripper Description:

The Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs. By employing ICP, microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.

Applications: MEMS, Compound Semiconductor, Advanced Packaging.

• Etch rates up to 6um/min
• High throughput
• Low plasma damage
• Self-tuning
• 100mm to 300mm wafers
• Small footprint
• Competitively priced.

For more information: http://www.triontech.com ..... info@triontech.com ..... +1 727-461-1888