SMT Equipment

Trion APO111 Apollo Photoresist Strip System

Company Information:

Leading provider of proactive asset management solutions. EquipNet helps its client track and redeploy asset internally. EquipNet also helps its clients gain capital return on idle assets by selling used inventory on MarketPlace.

Canton, Massachusetts, USA

Consultant / Service Provider, Distributor, Equipment Dealer / Broker / Auctions

  • Phone (781) 821-3482
  • Fax (617) 671-1269

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(3) used SMT equipment marketplace items

(2) products in the catalog

Trion APO111 Apollo Photoresist Strip System

Trion APO111 Apollo Photoresist Strip System

Name:

Trion APO111 Apollo Photoresist Strip System

Category:

Cleaning Equipment

Offered by:

EquipNet, Inc.

Trion APO111 Apollo Photoresist Strip System Description:

https://www.equipnet.com/trion-apo111-apollo-photoresist-strip-system-listid-601307/

Trion APO111 Apollo Photoresist Strip System

image

Ask Price:  $60,000.00 USD or Make An Offer 

Location:  FL, USA

Level of Removal:  Still Installed

Your currency: $60,000.00 USD

*All offers are submitted in Seller’s Acceptable Currency


Equipment Description:

Trion APO111 Apollo Photoresist Strip System

Includes as standard:

  • Apollo III reactor radially designed plenum
  • Genmark 3-Axis pick and place robot
  • System controller (includes Pentium computer and touch screen interface)
  • Inductively coupled plasma source with 1250 watt 13.56 MHz RF generator
  • One each mass flow controller (O2) (Expansion available to three total MFC's) 
  • Temperature control of bottom electrode from 50C to 250C
  • Automatic pressure control
  • Optical endpoint detection system
  • Additional monitor and VGA port
  • 60 cfm non-corrosive dry pump; Ebara S20P
  • Emergency Off and AC distribution
  • Installation for maintenance and operator
  • 12 Month service warranty (includes parts and labor)

Options:

  • Recirculating temperature controller (SMC HRS012-AN-20)
  • Custom end effector (heated with custom vacuum configuration)
  • Additional Optical endpoint detection system for O2 plasma process and installation
  • Integration of RS-232 Barcode Scanner to system computer
  • ICP Matching Network presets
  • Software Version: Apollo_2.51_Bld3
  • Note: Wafer Size Configured To: 100 mm; Wafer Size Capacity: 300 mm

Specifications:

  • Manufacturer Name: Trion Technology
  • Year: 2016
  • Serial Number: APO 111 5597 #13
  • CE marked: NO
  • Model: APO111
  • Voltage: 220 VOLTS
  • Frequency: 60 HERTZ
  • Phase: 3
  • Current: 15 AMPS
  • Dimensions: Standard- 95 x 22 x 62 IN - 570 LBS   Metric- 2413.00 x 558.80 x 1574.80 mm - 258.55 kg

Additional General Information:

General Description:

Trion Apollo Plasma Asher

Tool ID:

TRION13

Fab Process:

Resist Removal, Descum

Vendor/ Manufacturer:

Trion Technology

Model Number:

APO111

Serial number:

APO 111 5597 #13

Year of manufacture:

2016

Country of Origin:

US

Qorvo Asset number(s):

6581

Wafer size configured to:

Wafer size upgradable to (if known):

100mm

300mm

Software version:

Apollo_2.51_Bld3

Tool Status: (disconnected, in warehouse, crated, cold shutdown in fab, online, running): if not crated please list date expected to be moved out:

Disconnected, currently stored in Fab.

Hardware Config:

If good include a check, quantity included and describe

Main system

Process chambers (Qty and status):

1

Handling system:

Genmark robot

Other Hardware configuration:

1250W 13.56MHz ICP Matching Network

Bottom electrode Temp control, range 50C-250C

Automatic pressure control

Options included:

Heated end effector

System condition/ last used:

Last used 4/5/18

Known Faulty parts / Major missing Components (if none please specify):

Idled as working tool

SMIF System /Load ports

No

Upgrades/ Special features:

N/A

Facilities: Supply Voltage, sub fab items

220V, 15A, 3P

Refurb history

N/A

Support Equipment

Pumps sold with:

Chillers sold with:

1 Ebara S20P

1 SMC HRS012-AN-20

Used for :

(please list metals or chemicals used in processing) :

Oxygen etchant used for organic material removal.

Decon Completed?:

N/A

For more information contact: prummel@equipnet.com 

Trion APO111 Apollo Photoresist Strip System was added in Sep 2019

Trion APO111 Apollo Photoresist Strip System has been viewed 130 times

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