Economy Plasma Cleaning Machine with Vacuum Pump

Company Information:

Plastlist is a professional industrial solution provider, who is in engaged in design, manufacturing, equipment agency, material & accessories supply.

Taichung, Taiwan

Consultant / Service Provider, Manufacturer

886-423-260-632

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Company Postings:

(23) SMT parts, accessories & PCB supplies items

(161) products in the catalog

Name:	Economy Plasma Cleaning Machine with Vacuum Pump
Category:	Cleaning Equipment
Offered by:	Plastlist Group

Economy Plasma Cleaning Machine with Vacuum Pump Description:

Economy Plasma Cleaning Machine with Vacuum Pump

Features:

It is medium plasma cleaner with 6" Dia x 6.5"Length quartz chamber.

It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 4" using air, oxygen, or argon plasma.

The rate of organic removal is about 20 nm/min Maximum at high RF power.

It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality.

Specification:

Plasma Chamber	6" diameter x 6.5" length quartz chamber 3 Liter Capacity Hinged type door with viewing window for easy sample loading and observing
Vacuum Pump	One Single Step Rotary Vane Vacuum Pump (220V,187 L/m) with Exhaust filter and vacuum pipe are included for the equipment (220V).
RF Power	RF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W RF frequency: 13,56 MHz
Control Panel	Control Function: Clean time, RF Power, Vacuum Pump.
Inert Gas	Many inert gases can be chosen for plasma cleaning such as N2, Ar, Air and Mixed gas depended on what kind material will be treated. ( not included in the package) No flammable gas shall be used for the plasma cleaner
Optional	Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options or Click the picture left for Two Channel Gas Mixer. If use 4" wafer quartz boat, the cleaner can treat 25 pcs 2" Dia wafer per load
Input Power	AC 220V, 50/60 Hz RF Power: 100 W Max. Vacuum Pump: < 500W Total Power: < 600W
Dimensions	400mm L ×300mm W ×300mm H 16" x 12" x 12" (inch)
Net Weight	30 Lbs