Coating Thickness Measurement of Thin Gold and Palladium Coatings on Printed Circuit Boards using X-Ray Fluorescence

The purpose of this paper is to compare the performance of X-ray fluorescence (XRF) instruments with different detector systems (proportional counter, positive intrinsic negative and Si drift detectors) for measuring thin Au and Pd coatings on printed circuit boards and to investigate different ways of background treatment. It also aims to provide and certify suitable reference materials which are similar to samples used in production. Design/methodology/approach - XRF measurements were performed with different instruments and detector types. The quantification of the reference materials is based on XRF, gravimetric analysis and Rutherford backscattering (RBS).