SMT & PCB Assembly Equipment
SUPPLIER:  EquipNet, Inc.

Trion Technology APO111- Apollo Photoresist Strip System

Trion Technology APO111- Apollo Photoresist Strip System

Trion Technology APO111- Apollo Photoresist Strip System

Model:

Trion Technology APO111- Apollo Photoresist Strip System

Category:

Semiconductor & Solar

Model Year:

2016

Condition:

used

Value:

$ 60000.00

Location:

Florida, USA

Offered by:

EquipNet, Inc.

   
  Contact Supplier

Trion APO111 Apollo Photoresist Strip System

Location:  FL, USA

Level of Removal:  Still Installed

Equipment Description:

Trion APO111 Apollo Photoresist Strip System

Includes as standard:

  • Apollo III reactor radially designed plenum
  • Genmark 3-Axis pick and place robot
  • System controller (includes Pentium computer and touch screen interface)
  • Inductively coupled plasma source with 1250 watt 13.56 MHz RF generator
  • One each mass flow controller (O2) (Expansion available to three total MFC's)
  • Temperature control of bottom electrode from 50C to 250C
  • Automatic pressure control
  • Optical endpoint detection system
  • Additional monitor and VGA port
  • 60 cfm non-corrosive dry pump; Ebara S20P
  • Emergency Off and AC distribution
  • Installation for maintenance and operator
  • 12 Month service warranty (includes parts and labor)

Options:

  • Recirculating temperature controller (SMC HRS012-AN-20)
  • Custom end effector (heated with custom vacuum configuration)
  • Additional Optical endpoint detection system for O2 plasma process and installation
  • Integration of RS-232 Barcode Scanner to system computer
  • ICP Matching Network presets
  • Software Version: Apollo_2.51_Bld3
  • Note: Wafer Size Configured To: 100 mm; Wafer Size Capacity: 300 mm

Specifications:

  • Manufacturer Name: Trion Technology
  • Year: 2016
  • Serial Number: APO 111 5597 #13
  • CE marked: NO
  • Model: APO111
  • Voltage: 220 VOLTS
  • Frequency: 60 HERTZ
  • Phase: 3
  • Current: 15 AMPS
  • Dimensions: Standard- 95 x 22 x 62 IN - 570 LBS   Metric- 2413.00 x 558.80 x 1574.80 mm - 258.55 kg

Additional Information:

  • General Description:  Trion Apollo Plasma Asher
  • Tool ID: TRION13
  • Fab Process: Resist Removal, Descum
  •  Manufacturer: Trion Technology
  • Model Number: APO111
  • Serial number: APO 111 5597 #13
  • Year of manufacture:  2016
  • Country of Origin: US
  • Wafer size configured to:
  • Wafer size upgradable to (if known): 100mm
  • 300mm
  • Software version:  Apollo_2.51_Bld3
  • Tool Status: (disconnected, in warehouse, crated, cold shutdown in fab, online, running): if not crated please list date expected to be moved out: Disconnected, currently stored in Fab.

Hardware Configuration Information:

  • Main system:
  • Process chambers (Qty and status): 1
  • Handling system: Genmark robot
  • Other Hardware Configuration:  1250W 13.56MHz ICP Matching Network, Bottom electrode Temp control, range 50C-250C, Automatic pressure control
  • Options included: Heated end effector
  • System condition/ last used:  Last used 4/5/18
  • Known Faulty parts / Major missing Components (if none please specify): None- Idled as working tool
  • SMIF System /Load ports: No
  • Upgrades/ Special features: N/A
  • Facilities: Supply Voltage, sub fab items 220V, 15A, 3P
  • Support Equipment: -Pumps sold with: 1 Ebara S20P  -Chillers sold with: 1 SMC HRS012-AN-20
  • Used for (please list metals or chemicals used in processing):  Oxygen etchant used for organic material removal.

Link to Listing: https://www.equipnet.com/trion-apo111-apollo-photoresist-strip-system-listid-601307/

Ask Price:  $60,000.00 USD or Make An Offer

Company Information:

Leading provider of proactive asset management solutions. EquipNet helps its client track and redeploy asset internally. EquipNet also helps its clients gain capital return on idle assets by selling used inventory on MarketPlace.

Canton, Massachusetts, USA

Consultant / Service Provider, Distributor, Equipment Dealer / Broker / Auctions

  • Phone (781) 821-3482
  • Fax (617) 671-1269

See Supplier Website »

Company Postings:

(3) used SMT equipment marketplace items

(2) products in the catalog

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