PE-75 Plasma Ashing System

PE-75 Plasma Ashing System Description:

PE-75 Plasma Asher

Our most popular system for use as a plasma asher. Although all of our systems are versatile and can perform many tasks without changing configuration settings, the PE-75 is the best value in the industry for plasma ashing, the process of removing photoresist from an etched wafer.

Plasma ashing is performed with fluorine or oxygen and is almost always performed with a single gas plasma. The versatile PE-75 comes with two gases installed for other cleaning and etching purposes.

The PE-75 is our largest entry level plasma treatment system. It's a feature packed, low cost, and robust machine that is perfect for production facilities, research labs, universities, medical facilities, or any industry which needs a small-scale, cost-effective plasma ashing solution. It has all the features of the PE-50 XL but also features a larger chamber size for larger processing applications.

This unit excels at plasma cleaning and surface modification as well as use as a plasma asher.

The PE-75 may also be used in preparing asbestos specimens as a low temperature plasma treatment.

If you are looking for a fully automated solution, our PE-75 Venus plasma asher combines the high value of the PE-75 with fully automated processing. The Venus system includes the same laptop control found on our larger systems. 

Standard Features

Electrode Configuration

One Horizontal (9"Wx10"D + 5.5" Clearance)

Generator

400W 50KHz Continuously Variable Power Supply

Gas Control

Two 0-25cc/min Rotometers with Precision Needle Valves

Control System

PLC-Based Keypad Input System with Alphanumeric Display; Stores One Recipe for Automatic Process Sequencing

Vacuum Gauge

1-2000 mT

Vacuum Pump

5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

Chamber Material

6061-T6 Aluminum

Chamber Dimensions

10.75” Deep x 10” Round

Unit Dimensions

18"x19"x24"

Unit Weight

90lbs

Vacuum Pump Weight

35lbs

Made in the U.S.A.

Note: High frequency units may have larger external dimensions, so check with your sales rep if your space is limited.

Optional Features

All compact benchtop systems can be thoroughly customized with a wide range of features including:

MHz Power Supplies with Automatic Matching Network

Higher watt/frequency power supplies

PC-based Control System

For fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.

Dry Vacuum Pump

For more control over the process chamber pressure

Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator

To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity

Additional Gas Inputs/Rotometers

Allows for more complex process gas combinations

Digital Mass Flow Controllers

Provides digital automation and monitoring of process gases

Light Tower

For easy visualization of the steps of the plasma processing sequence

For more information about any of our systems, please call 775-883-1336 or visit: www.plasmaetch.com