Apr 11, 2002 Veldhoven, Netherlands
ASML (Nasdaq:ASML) today announced that the company's TWINSCAN(TM) and PAS 5500 lithography systems have achieved SEMI(R) E78, Level 1 compliance certification. ASML's compliance with SEMI E78-0998 standard, Electrostatic Compatibility: Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment, demonstrates the absence of electrostatic charging of reticles and wafers in its tools, which is necessary to avoid ESD-related yield losses. ASML received the certification from Ion Systems, Inc., after the TWINSCAN and PAS 5500 performed well in test procedures.
"Achieving the SEMI E78 standard compliance is further demonstration of ASML's leadership within the semiconductor lithography business because we are the first lithography supplier to receive this certification," said Paul van Attekum, ASML senior vice president of product marketing. "The issue of reticle and wafer charging was recognized many years ago and ASML's designs have been made ESD-friendly ever since. Effective management of electrostatic issues is part of our continuing commitment to provide our customers systems with optimal tool characteristics."
"Ion Systems has developed a full test procedure to perform SEMI E78 compliance testing. In high-end semiconductor manufacturing it is important for tool suppliers to achieve SEMI E78 compliance, especially as an increasing number of their customers migrate to 300 mm and as technology nodes continue to shrink. The benefits of electrostatics management are extremely important and play an integral role in helping customers avoid ESD and ESA-related yield losses," said Yuen Lee, senior vice president, Ion professional services.
About ASML:
ASML is one of the world's leading providers of advanced technology systems for the semiconductor industry. The company offers an integrated portfolio of lithography, track and thermal systems mainly for manufacturing complex integrated circuits. Headquartered in Veldhoven, The Netherlands, ASML is traded on Euronext Amsterdam and Nasdaq under the symbol ASML. In 2001, the company reported net sales of over EUR 1.8 billion. ASML employs approximately 7,000 people in 50 locations throughout the world. For more information, visit: http://www.asml.com
About Ion:
Ion is the world's largest provider of electrostatics management products and services. Ion improves its customers' business results by providing a total solution to their electrostatic discharge and electromagnetic interference challenges. Ion is an ISO 9001 and ANSI ESD S20.20 - 1999 certified company. Founded in 1978, Ion is headquartered in Berkeley, California, with operations worldwide. For more information about Ion visit http://www.ion.com or call 1-510-548-3640.
About SEMI:
Based in San Jose, Calif., SEMI is an international industry association serving more than 2,500 companies participating in the semiconductor and flat panel display equipment and materials markets. SEMI maintains offices in Austin, Beijing, Boston, Brussels, Hsinchu, Moscow, Seoul, Singapore, Tokyo and Washington, D.C. For more information, visit SEMI on the Internet at http://www.semi.org.
