Next-Generation Test Equipment For High-Volume Wafer Production
Published: |
June 23, 2010 |
Author: |
Kay Gastinger, Odd Løvhaugen |
Abstract: |
Quality control is one of the main bottlenecks in the production of micro-opto-electromechanical systems/microelectromechanical systems (MOEMS/MEMS) because each structure on a wafer is serially inspected and scanned stepwise over the entire wafer area. ... |
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