Evaluating Automated Wafer Measurement Instruments
Published: |
August 5, 1999 |
Author: |
Steven A. Eastman |
Abstract: |
This document demonstrates a sequential process of evaluating automated wafer instruments and discusses why this approach is useful for studying instruments that have automation features such as loading and focusing mechanisms. The methodology specifies a series of experiments consisting of two or more capability studies followed by a stability study. Each experiment achieves a separate goal, yet combines with the others in providing information needed to assess the usefulness of the instrument.... |
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